Blar i SINTEF Open på forfatter "Tyholdt, Frode"
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Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient
Dahl-Hansen, Runar Plunnecke; Polfus, Jonathan Marc; Vøllestad, Einar; Akkopru-Akgun, Betul; Denis, Lyndsey; Coleman, Kathleen; Tyholdt, Frode; Trolier-Mckinstry, Susan E; Tybell, Per Thomas Martin (Peer reviewed; Journal article, 2020)The ambient humidity significantly accelerates the degradation of lead zirconate titanate (PZT) films in microelectromechanical systems; the cause of such degradation is under debate. Here, it is shown that the degradation ... -
Microfluidic devices for photo-and spectroelectrochemical applications
Bogdanowicz, Robert; Jönsson-Niedziółka, Martin; Vereshchagina, Elizaveta; Dettlaff, Anna; Boonkaew, Suchanat; Pierpaoli, Mattia; Wittendorp, Paul; Jain, Shruti; Tyholdt, Frode; Thomas, Jacob; Wojcik, Pawel (Peer reviewed; Journal article, 2022)The review presents recent developments in electrochemical devices for photo- and spectroelectrochemical investigations, with the emphasis on miniaturization (i.e., nanointerdigitated complementary metal-oxide-semiconductor ... -
Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments
Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Tybell, Per Thomas Martin (Chapter, 2018)The number of application areas for piezoelectric micro electromechanical systems based on PZT have increased rapidly over the years. Thus, to continue the development towards commercial deployment, characterizing lifetime ... -
Qualification and applications of a piezoelectric MEMS process
Poppe, Erik; Østbø, Niels Peter; Tyholdt, Frode (Chapter, 2007)An industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized ...